TY  - BOOK
AU  - Ghandhi, S. K.
TI  - VLSI Fabrication Principles: Silicon and Gallium Arsenide
SN  - 9788126517909
U1  - 621.38171 20th
PY  - 1994///
CY  - India
PB  - John Wiley and Sons Inc
KW  - VLSI Technology
KW  - Semiconductor Device Fabrication
ER  -